poly depletion metal gate
Thiseffectiscalledpolysilicondepletion.Itleadstoareducedelectronconcentrationattheinterfaceandcausesaneffectiveincreaseofthedielectric ...,1)Polysilicondepletionlowersthegatecapandincreasestheeffectiveelectricalthicknessofthegateinsulator.2)Quant...
Why PolySi to HKMG
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2023年6月11日—WhyPolySitoHKMG.High-KMetalGate;隨元件/製程微縮,接近導體的PolySilicon(N+/P+Poly-Si)問題越明顯。因為本質是半導體,在小尺寸下,閘極 ...
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